Composition and structure of Pd nanoclusters in SiOₓ thin film
Thøgersen, Annett · Mayandi, Jeyanthinath · Vines, Lasse · Sunding, Martin F. · Olsen, Arne · Diplas, Spyros · Mitome, Masanori · Bando, Yoshio
Original · EN
The nucleation, distribution, composition and structure of Pd nanocrystals in SiO₂ multilayers containing Ge, Si, and Pd are studied using High Resolution Transmission Electron Microscopy (HRTEM) and X-ray Photoelectron Spectroscopy (XPS), before and after heat treatment. The Pd nanocrystals in the as deposited sample seem to be capped by a layer of PdOₓ. A 1-2 eV shift in binding energy was found for the Pd-3d XPS peak, due to initial state Pd to O charge transfer in this layer. The heat treatment results in a decomposition of PdO and Pd into pure Pd nanocrystals and SiO₂.
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