AC-coupled GaAs microstrip detectors with a new type of integrated bias resistors

Irsigler, R.; Geppert, R.; Goeppert, R.; Hornung, M.; Ludwig, J.; Rogalla, M.; Runge, K.; Schmid, Th.; Soldner-Rembold, A.; Webel, M.

doi:10.1016/S0168-9002(98)00007-2

arXiv 1997-09-30 DOI 10.1016/S0168-9002(98)00007-2 0 مشاهدة

AC-coupled GaAs microstrip detectors with a new type of integrated bias resistors

Irsigler, R. · Geppert, R. · Goeppert, R. · Hornung, M. · Ludwig, J. · Rogalla, M. · Runge, K. · Schmid, Th. · Soldner-Rembold, A. · Webel, M. · Weber, C.

Instrumentation and Detectors

الأصل · EN

Full size single-sided GaAs microstrip detectors with integrated coupling capacitors and bias resistors have been fabricated on 3'' substrate wafers. PECVD deposited SiO₂ and SiO₂/Si₃N₄ layers were used to provide coupling capacitaces of 32.5 pF/cm and 61.6 pF/cm, respectively. The resistors are made of sputtered CERMET using simple lift of technique. The sheet resistivity of 78 kOhm/sq. and the thermal coefficient of resistance of less than 4x10-3 / degree C satisfy the demands of small area biasing resistors, working on a wide temperature range.

الترجمة العربية

لا توجد ترجمة عربية لهذا البحث بعد. كن أوّل من يطلبها: تستغرق ثوانيَ معدودة، وتُحفظ النتيجة لكل قارئ قادم.

اقرأ على arXiv