The mechanism of ion induced amorphization in Si
Lenka, H. P. · Bhatta, U. M. · Kuiri, P. K. · Sahu, G. · Joseph, B. · Satpati, B. · Mahapatra, D. P.
Original · EN
Some results on damage build up in, and amorphization of, Si, induced by 25-30 keV Al₅-, Si₅- and Cs- ions, at room temperature, are reported. We show that at low energy, amorphization is a nucleation and growth process, based on the direct impact mechanism. With an Avrami exponent 1.6, the growth towards amorphization seems to be diffusion limited. A transition to a completely amorphized state is indicated at a dose exceeding 17 eV/atom, which is higher than 6-12 eV/atom as predicted by simulations. The observed higher threshold could be due to temperature effects although an underestimation of keV-energy recoils, in simulation, may not be ruled out.
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