Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations
Astafiev, O. V. · Buzynin, A. N. · Kalinushkin, V. P. · Murin, D. I. · Yuryev, V. A.
الأصل · EN
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.
الترجمة العربية
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