Design of a surface acoustic wave mass sensor in the 100 GHz range
Nardi, Damiano · Zagato, Elisa · Ferrini, Gabriele · Giannetti, Claudio · Banfi, Francesco
Original · EN
A design for photoacoustic mass sensors operating above 100 GHz is proposed. The design is based on impulsive optical excitation of a pseudosurface acoustic wave in a surface phononic crystal with nanometric periodic grating, and on time-resolved extreme ultraviolet detection of the pseudosurface acoustic wave frequency shift upon mass loading the device. The present design opens the path to sensors operating in a frequency range currently unaccessible to electro-acoustical transducers, providing enhanced sensitivity, miniaturization and incorporating time-resolving capability while forgoing the piezoelectric substrate requirement.
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