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arXiv 2003-09-29 0 views

Modeling electric field sensitive scanning probe measurements for a tip of arbitrary shape

Kuljanishvili, I. · Chakraborty, Subhasish · Maasilta, I . J. · Tessmer, S. H. · Melloch, M. R.

Original · EN

We present a numerical method to model electric field sensitive scanning probe microscopy measurements which allows for a tip of arbtrary shape and invokes image charges to exactly account for a sample dielectric overlayer. The method is applied to calculate the spatial resolution of a subsurface charge accumulation imaging system, achieving reasonable agreement with experiment.

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